• 商品名称：Panasonic Wafer Mapping Sensor M-DW1
• 商品编号：PLTS000789
• 品牌：Panasonic
• 上架时间：2024-04-17
• 商品毛重：0克
• 一级分类：LED测距

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晶圆位置映射 重叠检测

 

CE marking directive compliance EMC Directive, RoHS Directive

Center sensing distance 45 mm 1.772 in

Sensing object 3 inch or larger semiconductor wafer (Note 2)

Detectable surface Surface having a side edge which reflects light in the light receiving direction (Note 3)

Sensing angle 12.5 ± 5° (Note 4)

Wafer pitch Separate sensing is possible at normal sensitivity for 3 mm 0.118 in pitch or more (Note 5)

Suitable cassette SEMI standard FOUP cassette / open cassette

Supply voltage 12 to 24 V DC ±10 % Ripple P-P 10 % or less

Current consumption 65 mA or less

Output

NPN output / PNP output, selectable with output selection switch

<NPN output>

NPN open-collector transistor

• Maximum sink current: 100 mA

• Applied voltage: 30 V DC or less (between output and 0 V)

• Residual voltage: 1 V or less (at 100 mA sink current)

0.4 V or less (at 16 mA sink current)

<PNP output>

PNP open-collector transistor

• Maximum source current: 100 mA

• Applied voltage: 30 V DC or less (between output and +V)

• Residual voltage: 1 V or less (at 100 mA source current)

0.4 V or less (at 16 mA source current)

Utilization category DC-12 or DC-13

Output operation Light-ON/Dark-ON, selectable by switch

Short-circuit protection Incorporated (restored automatically)

Response time 500 μs or less

Operation indicator Orange LED (lights up when the output is ON)

Stability indicator Green LED (lights up under stable light received condition or stable dark condition)

Timer function Approx. 2 ms fixed OFF-delay timer, switchable either effective or ineffective

Test input (emission halt input)

Signal condition

• Emission Halt: Open, or 4 to 8 V

• Emission: 0 to 3 V, or 9 V to +V (26.4 V max.)

Sensitivity selection input

Signal condition

• Input OFF: Open, or 4 to 8 V

• Input ON: 0 to 3 V, or 9 V to +V (26.4 V max.)

Sensitivity setting Back surface teaching: effectuated with sensor’s sensitivity setting button

Detection sensitivity selection: 4 levels with sensor’s 2 bit switch or 2 levels with external input selectable

Environmental resistance

Pollution degree 3 (Industrial environment)

Protection IP20 (IEC)

Ambient temperature 0 to +55 °C +32 to +131 °F (No dew condensation), Storage: –10 to +70 °C +14 to +158 °F

Ambient humidity 35 to 85 % RH, Storage: 35 to 85 % RH

Ambient illuminance Incandescent light: 3,000 ℓx or less at the light-receiving face, Fluorescent light: 1,500 ℓx or less at the light-receiving face

Voltage withstandability 1,000 V AC for one min. between all supply terminals connected together and enclosure

Insulation resistance 20 MΩ, or more, with 250 V DC megger between all supply terminals connected together and enclosure

Vibration resistance 10 to 500 Hz frequency, 3 mm 0.118 in double amplitude in X, Y and Z directions for two hours each

Shock resistance 98 m/s2 acceleration (10 G approx) in X, Y and Z directions five times each

Emitting element LED (modulated)

Material Enclosure: ABS and Stainless steel (SUS301), Lens: Acrylic

Cable 0.15 mm2 5-core cabtyre cable, 300 mm 11.811 in long

Cable extension Extension up to total 10 m 32.808 ft is possible with 0.15 mm2, or more, cable.

Weight Net weight: 75 g approx.

商品属性
[一级分类]	LED测距

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